ASUZAC
Fine Ceramics Division
981, OazaNakayama, Takayamamura, Kamitakaigun, Nagano Pref.382-8508, Japan
TEL 81-26-352-2196
FAX 81-26-354-3160
ASUZAC Inc. had started fine ceramic production in 1981.
ASUZAC fine ceramics division delivers high quality fine ceramics products such as semiconductor ceramic components and parts used in wafer processing equipment to our world wide customers. We have a complete system from materials research to manufacturing and appraisal technologies.
ASUZAC fine ceramics division delivers high quality fine ceramics products such as semiconductor ceramic components and parts used in wafer processing equipment to our world wide customers. We have a complete system from materials research to manufacturing and appraisal technologies.
SiC TRAYSSiC Tray applications in the LED manufacturing industry
* for ECR ETCHING, ICP ETCHING & DRY-ETCHING SYSTEMS
* for MOCVD SYSTEMS
SiC CHAMBER PARTS
Also SiC is best fit for the chamber parts for the semiconductor production equipment
Why Ceramic Trays ?
* Unique groove design for easy handling.
* Wide variety of tray sizes from Φ200 to Φ400 for the LED production line.
* Other than SiC, wide variety of material selections from Alumina, Corseed ®, Alsima L®
Features of SiC compared to Alumina
- Harder than Alumina
- Better High Temperature Strength
- Better Corrosion Resistivity
- Less Sliding Abrasion
- Better Thermal Conductivity
Other SiC products
