981, OazaNakayama, Takayamamura, Kamitakaigun, Nagano Pref.
Fine Ceramics Division
ASUZAC fine ceramics division delivers high quality fine ceramics products such as semiconductor ceramic components and parts used in wafer processing equipment to our world wide customers. We have a complete system from materials research to manufacturing and appraisal technologies.
SiC Tray applications in the LED manufacturing industry
* for ECR ETCHING, ICP ETCHING & DRY-ETCHING SYSTEMS
* for MOCVD SYSTEMS
SiC CHAMBER PARTS
Also SiC is best fit for the chamber parts for the semiconductor production equipment
Why Ceramic Trays ?
* Unique groove design for easy handling.
* Wide variety of tray sizes from Φ200 to Φ400 for the LED production line.
* Other than SiC, wide variety of material selections from Alumina, Corseed ®, Alsima L®
Features of SiC compared to Alumina
- Harder than Alumina
- Better High Temperature Strength
- Better Corrosion Resistivity
- Less Sliding Abrasion
- Better Thermal Conductivity
Other SiC products